Semiconductor device including trench capacitor and manufacturing method of the same

A semiconductor device includes a semiconductor substrate, a trench including a narrowed portion and a main part, a diameter of the narrowed portion being coaxially smaller than a diameter of the trench at the main part, a first capacitor electrode provided in the semiconductor substrate so as to su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MITA, ATSUO, TAKENAKA, KEIICHI, OIWA, NORIHISA, SAKAI, ITSUKO, NARITA, MASAKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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