Method of fabricating floating gate
A fabricating method of a floating gate is described. A substrate having patterned a liner layer and a mask layer thereon and a trench therein is provided. A tunnel oxide is formed on the surface of the trench. A conductive layer is filled in the trench. An etching step is performed to form a first...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!