High density area array solder microjoining interconnect structure and fabrication method

A system for interconnecting a set of device chips by means of an array of microjoints disposed on an interconnect carrier is taught. The carrier is provided with a dense array of microjoint receptacles with an adhesion layer, barrier layer and a noble metal layer; the device wafers are fabricated w...

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Bibliographische Detailangaben
Hauptverfasser: SAMBUCETTI, CARLOS JUAN, PURUSHOTHAMAN, SAMPATH, VOLANT, RICHARD PAUL, MAGERLEIN, JOHN HAROLD, PETRARCA, KEVIN SHAWN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A system for interconnecting a set of device chips by means of an array of microjoints disposed on an interconnect carrier is taught. The carrier is provided with a dense array of microjoint receptacles with an adhesion layer, barrier layer and a noble metal layer; the device wafers are fabricated with an array of microjoining pads comprising an adhesion layer, barrier layer and a fusible solder layer with pads being located at matching locations in reference to the barrier receptacles; said device chips are joined to said carrier through the microjoint arrays resulting in interconnections capable of very high input/output density and inter-chip wiring density.