Multilevel interdigitated metal capacitor structure
A multilevel interdigitated metal capacitor structure is disclosed. In the multilevel interdigitated metal capacitor structure, each level consists of two comb-like metal electrodes of opposite polarities interdigitated with one another, and the comb-like structures of metal electrodes in the any tw...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A multilevel interdigitated metal capacitor structure is disclosed. In the multilevel interdigitated metal capacitor structure, each level consists of two comb-like metal electrodes of opposite polarities interdigitated with one another, and the comb-like structures of metal electrodes in the any two adjacent levels are perpendicular to one another, and the metal electrodes of the same polarity are interconnected by vias on the edges of the comb-like structures, wherein any two metal electrodes are separated by dielectric materials. |
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