Substrate holder

The invention relates to a substrate holder, wherein substrates can be easily separated without friction. The a substrate holder comprises at least two substrate retaining elements, having substantially the same circumference for maintaining disc-shaped substrates therebetween, at least one of the retaining elements defining a cavity for receiving the substrates. At least one of the substrate retaining elements is provided with at least a magnet for maintaining together said retaining elements. Additionally, at least a recess provided in the first of the substrate retaining elements enables a second retaining element to be gripped from the rear side, while at least an opening in said second retaining element enables the insertion of an element for retaining a handling device. The invention also concerns a method, as well as a device for maintaining substrates, said device comprising at least first and second substrate retaining elements, having substantially the same circumference, for maintaining disc-shaped substrates therebetween, at least one of said substrate retaining elements being provided with at least a magnet for maintaining together said retaining elements. A handling device is used for separating the substrate retaining elements, said device comprising at least a retaining element for locking the first retaining element, as well as at least a gripping element, mobile relative to the retaining element, for gripping and moving the second retaining element. The grip element can be moved between an open position, releasing the second retaining element, and a closed position, wherein the second retaining element is gripped from the rear, said grip element being mobile in a direction substantially perpendicular to a junction plane of the substrate retaining elements.