Substrate transmission method

A method for accurately transmitting a substrate by a robot arm in a vacuum, comprising the steps of detecting the extended amount of the robot arm for transmitting the substrate (4) in the vacuum, and feeding back the extended amount to the drive device (10) of the robot arm to correct an arm drive...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TSUGUEDA, TAKAYUKI, MATSUDAI, MASASUKE, SHISHIKURA, MASATO, SUNAGA, YOSHIO, OOZORA, HIROKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A method for accurately transmitting a substrate by a robot arm in a vacuum, comprising the steps of detecting the extended amount of the robot arm for transmitting the substrate (4) in the vacuum, and feeding back the extended amount to the drive device (10) of the robot arm to correct an arm drive amount each time the specified number of substrates is transmitted or when the extended amount exceeds a specified value.