Heat treatment method and device

In the heat treatment method, with which a plurality of objects to be treated are placed over multiple stages in the direction of the height inside a treatment vessel and heating it with a heating means, a specified target heating quantity acquiring operation has previously been performed for acquir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKIZAWA, TAKESHI, SAITO, TAKANORI, EICKMANN, KARUKI, MAKITANI, TOSHIYUKI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:In the heat treatment method, with which a plurality of objects to be treated are placed over multiple stages in the direction of the height inside a treatment vessel and heating it with a heating means, a specified target heating quantity acquiring operation has previously been performed for acquiring the target heating quantity of the heating means to perform the heat treatment of the objects to be treated. The heat treatment device has a treatment vessel, a temperature detector for control and the temperature detector for correction inside the treatment vessel, the temperature detector for correction is provided with a protecting pipe composed of the body part of a protection pipe extended in the direction of the height and a plurality of branch pipe parts extended horizontally from this body part of the protection pipe, and each of branch pipe parts is arranged with a thermoelectric couple and inserted between the objects, to be treated at mutually different height positions.