Method and device for assembling substrates

In order to reduce cycle times for assembling at least two substrates and to form an optical data carrier in a low-pressure chamber, in which an opening of the low-pressure chamber is sealed in relation to the surrounding environment, the low-pressure chamber is pumped out, and a transfer chamber is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEONHARDT, STEPHAN, WAGNER, ROLAND DR, SPEER, ULRICH
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In order to reduce cycle times for assembling at least two substrates and to form an optical data carrier in a low-pressure chamber, in which an opening of the low-pressure chamber is sealed in relation to the surrounding environment, the low-pressure chamber is pumped out, and a transfer chamber is formed between a first handling device arranged in the low-pressure chamber and a second handling device arranged outside the low-pressure chamber by respectively sealing the opening of the low-pressure chamber. The transfer chamber has a smaller volume than that of the low-pressure chamber. The substrates in the transfer chamber are transferred from the second handling device to the first handling device. The substrates are conveyed with the first handling device to an assembly station in the low-pressure chamber when the low-pressure chamber is sealed by the second handling device and the substrates are assembled in the assembly station.