Trench isolation with self-aligning surface sealing and method for fabricating such a trench isolation

Trench isolation with self-aligning surface sealing and method for fabricating such a trench isolation

The invention relates to a trench isolation (20) with a self-aligning surface sealing (4) and a fabrication method for said surface sealing (4). In this case, the surface sealing (4) may have an overlap region (10) of the substrate surface (1) or a receded region into which extends an electrically c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TEMMLER, DIETMAR, WICH-GLASEN, ANDREAS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The invention relates to a trench isolation (20) with a self-aligning surface sealing (4) and a fabrication method for said surface sealing (4). In this case, the surface sealing (4) may have an overlap region (10) of the substrate surface (1) or a receded region into which extends an electrically conductive layer (1a) formed on the substrate surface (1).