Substrate holding apparatus
The present invention provides a substrate holding device comprising a frame having an opening, and a substrate sucking member disposed corresponding to the center of the glass substrate when the glass substrate is disposed on the substrate bracket.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention provides a substrate holding device comprising a frame having an opening, and a substrate sucking member disposed corresponding to the center of the glass substrate when the glass substrate is disposed on the substrate bracket. |
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