Multi-tool control system, method and medium
A system, method and medium for facilitating communication between tools in a semiconductor (e.g., wafer) processing facility. In particular, the present invention provides greater control of the overall semiconductor product output of groups of tools in terms of the quantity and/or quality of a fin...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A system, method and medium for facilitating communication between tools in a semiconductor (e.g., wafer) processing facility. In particular, the present invention provides greater control of the overall semiconductor product output of groups of tools in terms of the quantity and/or quality of a final semiconductor product. |
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