Smart load port with integrated carrier monitoring and fab-wide carrier management system

A system is disclosed capable of monitoring a plurality of performance characteristics of a wafer carrier on a load port, and to a system for managing carrier operation on a fab-wide basis. A load port assembly capable of monitoring characteristics of a carrier having a carrier door removably coupled to a carrier shell, the load port assembly comprising: a port door having latch keys capable of decoupling the carrier door from the carrier shell, said port door includes: at least one monitoring system selected from a group consisting of (i) a torque measurement system, and (ii) a wafer height measurement system; a carrier advance plate having registration pins for engaging the carrier shell while the carrier is seated on said carrier advance plate, and capable of moving a carrier seated upon said carrier advance plate towards said port door, said carrier advance plate includes: at least two monitoring systems selected from a group consisting of (i) a carrier identification reader, (ii) a carrier configuration detector, (iii) a resistivity measurement system, (iv) a cleanliness measurement system, (v) a seal performance detector, and (vi) a relative humidity detector.