Polishing cloth, polishing apparatus and method for manufacturing semiconductor device

An abrasive cloth having an abrasive layer containing a polymer material which is hydrolyzed by an aqueous medium is disclosed. The abrasive cloth is capable of exhibiting stable polishing performance for a relatively long period of time with no dressing treatment.

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Bibliographische Detailangaben
Hauptverfasser:	OSHIBE, YOSHIHIRO, ISHIDOYA, MASAHIRO, SAITO, AKIKO, SAKURAI, NAOAKI, HIRABAYASHI, HIDEAKI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GENERAL PROCESSES OF COMPOUNDING GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS WORKING-UP
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Beschreibung
Zusammenfassung:	An abrasive cloth having an abrasive layer containing a polymer material which is hydrolyzed by an aqueous medium is disclosed. The abrasive cloth is capable of exhibiting stable polishing performance for a relatively long period of time with no dressing treatment.