Electrolytic machining method and apparatus

An anode as a workpiece, and a cathode opposed to the anode with a predetermined spacing are placed in ultra pure water. A catalytic material promoting dissociation of the ultra pure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultra pure water...

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Bibliographische Detailangaben
Hauptverfasser: TOMA, YASUSHI, SAITO, TAKAYUKI, SHIRAKASHI, MITSUHIKO, MORI, YUZO, FUKUNAGA, AKIRA+
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An anode as a workpiece, and a cathode opposed to the anode with a predetermined spacing are placed in ultra pure water. A catalytic material promoting dissociation of the ultra pure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultra pure water is formed inside the catalytic material, with a voltage being applied between the workpiece and the cathode, to decompose water molecules in the ultra pure water into hydrogen ions and hydroxide ions, and supply the resulting hydroxide ions to a surface of the workpiece, thereby performing removal processing of or oxide film formation on the workpiece through a chemical dissolution reaction or an oxidation reaction mediated by the hydroxide ions. Thus, clean processing can be performed by use of hydroxide ions in ultra pure water, with no impurities left behind on the processed surface of the workpiece.