A modular control system and method for a cmp tool

A system and method for an automated chemical mechanical planarization (CMP) machine. The system comprises a plurality of interchangeable CMP process modules. Each module is a compilation of grouped software codes called ""objects"". Process modules may be added or deleted from t...

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Bibliographische Detailangaben

Hauptverfasser:	FRESEMAN, MARK, NIMTZ, JACK F, SMITH, RANDY, RICKORDS, GARY
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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