Method for real time controlling semiconductor processing equipment

A method for controlling semiconductor processing equipment in real time is disclosed. In the method, an interlock module capable of automatically stopping process with products and operation of the equipment is constructed in a host computer. If data measured in a measuring process do not satisfy o...

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Bibliographische Detailangaben
Hauptverfasser:	JEON, HEUI-SIK, WEON, JONG-HWAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	A method for controlling semiconductor processing equipment in real time is disclosed. In the method, an interlock module capable of automatically stopping process with products and operation of the equipment is constructed in a host computer. If data measured in a measuring process do not satisfy optimal measurement data set in the host computer, main specific and sub-specific rules, the process with the products and the operation of the equipment are selectively or simultaneously stopped by the interlock module. Thereby, it is possible to determined in real time whether the process is performed under the optimal process condition or not right after a measuring process is performed. Therefore, the process can be prevented from being poorly performed. In addition, since it is determined whether the process is normally performed or not based on a variety of statistic data such as main specific and sub-specific rules used in SPC, causes of poorly performed process can be accurately and rapidly determined.