Engineered polishing pad for improved slurry distribution

The present invention provides a polishing pad and a method for manufacturing the polishing pad; the polishing pad comprising a polishing body having a polishing surface and a plurality of nonconcentric fossae formed in the polishing surface and having a geometric shape. In one embodiment, the geome...

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Bibliographische Detailangaben
Hauptverfasser:	MICELI, FRANK, MERCHANT, SAILESH MANSINH, MAZE, JOHN ALBERT III, EASTER, WILLIAM GRAHAM, CREVASSE, ANNETTE MARGARET
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention provides a polishing pad and a method for manufacturing the polishing pad; the polishing pad comprising a polishing body having a polishing surface and a plurality of nonconcentric fossae formed in the polishing surface and having a geometric shape. In one embodiment, the geometric shape is a circle. The geometric shape, in an alternative embodiment, is a polygon. In a particularly advantageous embodiment, the polygon is a hexagon.