Work carrier device and attitude holding method of work carrier device
This invention is to control the position of a work while restraining enlargement and increase of weight, and to move a work WK linearly along a horizontal line, by preventing the moving trajectory of the work from changing into a curve deflected in its self-weight direction when carrying the work b...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | This invention is to control the position of a work while restraining enlargement and increase of weight, and to move a work WK linearly along a horizontal line, by preventing the moving trajectory of the work from changing into a curve deflected in its self-weight direction when carrying the work by a carrying robot to the carry-in port of a load locking chamber. Deflection of arms (A1, A2) is restrained by giving tensile force to belts (6, 9) wound between pulleys (5, 8) provided on head end parts of the arms (A1, A2) and pulleys (4, 7) provided on base end parts through idler rollers (11, 21) and tension rollers (12, 22). |
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