Wafer aligning apparatus in semiconductor device fabrication process
There is provided a wafer aligning apparatus in semiconductor device fabrication process having a guide roller that flows out the static electricity generated on the guide roller that rotates contacted with wafers in order to align the wafers. The apparatus comprises: a cassette support on which a c...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | There is provided a wafer aligning apparatus in semiconductor device fabrication process having a guide roller that flows out the static electricity generated on the guide roller that rotates contacted with wafers in order to align the wafers. The apparatus comprises: a cassette support on which a cassette for wafers is mounted; a guide roller that rotates while contacting with the wafers inside the cassette, and is formed with carbon filter-reinforced polyether; and a wafer support that supports the wafers rotated and aligned by the guide roller. |
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