Magnetic-field applied Czochralski crystal growth apparatus
A magnetic-field applied Czochralski crystal growth apparatus having at least one growing furnace for containing molten semicondutor material, a pulling device for pulling a crystal from the molten semiconductor material in a perdetermined direction, and a magnetic field generator for generating a m...
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Sprache: | eng |
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Zusammenfassung: | A magnetic-field applied Czochralski crystal growth apparatus having at least one growing furnace for containing molten semicondutor material, a pulling device for pulling a crystal from the molten semiconductor material in a perdetermined direction, and a magnetic field generator for generating a magnetic field to be applied to the molten semiconductor material. The magnetic field generator has a plurality of magnet units and a coupling mechanism coupling the magnet units together such that the growing furnace is located between said magnet units. |
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