Method to generate a noble-metal-containing structure on a substrate and semiconductor-element with such a noble-metal-containing structure

This method propose that, noble-metal be carried into a pre-structure through the reaction of a gas-formed compound of the noble-metal with a non-noble metal of the pre-structure in elementary noble-metal and a gas-formed compound of the non-noble metal, until an expected amount of the non-noble met...

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Bibliographische Detailangaben
Hauptverfasser: MAZURE-ESPEJO, CARLOS DR, WEINRICH, VOLKER DR
Format: Patent
Sprache:eng
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Zusammenfassung:This method propose that, noble-metal be carried into a pre-structure through the reaction of a gas-formed compound of the noble-metal with a non-noble metal of the pre-structure in elementary noble-metal and a gas-formed compound of the non-noble metal, until an expected amount of the non-noble metal of the pre-structure is replaced by the noble-metal.