Process for manufacturing antifuse structure
An antifuse may include one or more interfacial oxide film layers surrounding an antifuse dielectric layer to provide narrowing of the antifuse programming voltage distribution and to improve the antifuse yield and long term reliability.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An antifuse may include one or more interfacial oxide film layers surrounding an antifuse dielectric layer to provide narrowing of the antifuse programming voltage distribution and to improve the antifuse yield and long term reliability. |
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