Means for scraping off dust particles, used in disposal of waste gas resulting from semiconductor manufacturing process

A means for scraping off dust particles, used in disposal of waste gas resulting from semiconductor manufacturing process, which includes a scraper rotating portion for rotating a scraper configured to simultneously scrape off fine reactant particles adsorbed to an inner surface of a waste gas colle...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KIM, JIN-MAN, CHOI, KYUE-SANG, KIM, HEE-DUCK
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING COMBUSTION APPARATUS COMBUSTION PROCESSES DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE FLUES FURNACES HEATING KILNS LIGHTING MECHANICAL ENGINEERING OVENS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTIONRESIDUES RETORTS SEPARATION TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	A means for scraping off dust particles, used in disposal of waste gas resulting from semiconductor manufacturing process, which includes a scraper rotating portion for rotating a scraper configured to simultneously scrape off fine reactant particles adsorbed to an inner surface of a waste gas collecting unit and a surface of a cone in a collection inducing portion of the collection unit. The scraper is designed to be fixed to a scraper support rod, which is formed coaxially with a cone support rod and rotated through a 360 DEG arc. The fine reactant particle collection efficiency is much higher compared with conventional devices that only rotate through a 180 DEG arc, and must repeatedly reverse directions during scraping operations.