Self-cleaning focus ring

A self-cleaning focus ring (90) for processing a substrate (25) in a plasma in a plasma zone, comprises a dielectric barrier (92) with a focusing surface (95) for directing and focusing a plasma onto a substrate surface, and an electrical conductor element (100) abutting at least a portion of the di...

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Bibliographische Detailangaben
Hauptverfasser:	KHOLODENKO, ARNOLD, MAK, STEVE S. Y
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A self-cleaning focus ring (90) for processing a substrate (25) in a plasma in a plasma zone, comprises a dielectric barrier (92) with a focusing surface (95) for directing and focusing a plasma onto a substrate surface, and an electrical conductor element (100) abutting at least a portion of the dielectric barrier (92). The conductor element (100) is electrically charged to attract the plasma ions toward the focusing surface (92) of the dielectric barrier (92), whereby the energetic impingement of the plasma ions on the focusing surface (95) reduces the formation of deposits on the dielectric barrier (92).