Production method for a capacitor-electrode made from a platinum metal

Production method for a capacitor-electrode made from a platinum metal

This invention is to produce on a carrier with silicon-containing surface a conductive electrode-body (10) for a capacitor-electrode. Platinum is deposited on the whole surface, in a temperature-step the platinum is silicied outside the electrode-body and the platinum-silicid is removed. The advanta...

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Hauptverfasser: MAZURE-ESPEJO, CARLOS DR, WEINRICH, VOLKER DR, HARTNER, WALTER, SCHINDLER, GUNTHER DR
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator MAZURE-ESPEJO, CARLOS DR
WEINRICH, VOLKER DR
HARTNER, WALTER
SCHINDLER, GUNTHER DR
description This invention is to produce on a carrier with silicon-containing surface a conductive electrode-body (10) for a capacitor-electrode. Platinum is deposited on the whole surface, in a temperature-step the platinum is silicied outside the electrode-body and the platinum-silicid is removed. The advantage of this invention is the avoidance of an etching process for metallic platinum.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Production method for a capacitor-electrode made from a platinum metal
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