Production method for a capacitor-electrode made from a platinum metal
This invention is to produce on a carrier with silicon-containing surface a conductive electrode-body (10) for a capacitor-electrode. Platinum is deposited on the whole surface, in a temperature-step the platinum is silicied outside the electrode-body and the platinum-silicid is removed. The advanta...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | This invention is to produce on a carrier with silicon-containing surface a conductive electrode-body (10) for a capacitor-electrode. Platinum is deposited on the whole surface, in a temperature-step the platinum is silicied outside the electrode-body and the platinum-silicid is removed. The advantage of this invention is the avoidance of an etching process for metallic platinum. |
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