Power-microscopy-probe

In a power-microscopy-probe with a conductive spring-bar and a conductive probe-tip, said spring-bar is provided with a screen-electrode, and between said screen-electrode and spring-bar is arranged an isolated layer. By this way the electrostatic force generated in operation can be eliminated.

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Bibliographische Detailangaben
Hauptverfasser:	GUENTHER, EWALD, LEUSCHNER, RAINER, OHLSSON, OLAF
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	In a power-microscopy-probe with a conductive spring-bar and a conductive probe-tip, said spring-bar is provided with a screen-electrode, and between said screen-electrode and spring-bar is arranged an isolated layer. By this way the electrostatic force generated in operation can be eliminated.