Thermocouple of apparatus for manufacturing semiconductor device

A type of thermocouple for the manufacturing of semiconductors comprising: 2 metal wires of different materials of which one end of both is connected; the first insulator coated on one of the metal wires from the joint to the first length; a second insulator with a brittleness factor lower than that...

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Bibliographische Detailangaben
1. Verfasser:	DONG-OK JUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING COMBUSTION APPARATUS COMBUSTION PROCESSES ELECTRICITY HEATING LIGHTING MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MECHANICAL ENGINEERING PHYSICS REGULATING OR CONTROLLING COMBUSTION TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR WEAPONS
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Beschreibung
Zusammenfassung:	A type of thermocouple for the manufacturing of semiconductors comprising: 2 metal wires of different materials of which one end of both is connected; the first insulator coated on one of the metal wires from the joint to the first length; a second insulator with a brittleness factor lower than that of the first one for the coating of the bare part of the coated metal wires, from the first insulator to a second length.