Conduit system, radiation source, lithographic apparatus, and methods thereof

A radiation source includes a chamber, a window, and a conduit system. The chamber confines a gas and contaminants produced during the generation of radiation. The window isolates the gas from an environment external to the chamber and allows the radiation to travel between the gas chamber and the e...

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Bibliographische Detailangaben
1. Verfasser:	STEIGER, THOMAS DICKSON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACTUATING-FLOATS APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS BLASTING CINEMATOGRAPHY COCKS DEVICES FOR VENTING OR AERATING DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MECHANICAL ENGINEERING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A radiation source includes a chamber, a window, and a conduit system. The chamber confines a gas and contaminants produced during the generation of radiation. The window isolates the gas from an environment external to the chamber and allows the radiation to travel between the gas chamber and the environment. The refill path allows a replacement of the gas. The conduit system directs a flow of one of a refill gas, the gas, or the refill gas and the gas at least during a refill operation to prevent the contaminant from contacting the window. The conduit system may include one or more unidirectional valves which may be magnetic check valves. A permanent magnet component of the magnetic check valve may be disposed external to the conduit and the chamber so that the permanent magnet component is not subjected to corrosion by the gas in the conduit or the chamber.