Semiconductor structure with etch stop layer and method for making the same
The present disclosure relates to semiconductor structures, methods for making the same, and methods using the same. The semiconductor structure comprises a first substrate, a second substrate on the first substrate, a first bonding layer between the first substrate and the second substrate, a first...
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| Hauptverfasser: | , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present disclosure relates to semiconductor structures, methods for making the same, and methods using the same. The semiconductor structure comprises a first substrate, a second substrate on the first substrate, a first bonding layer between the first substrate and the second substrate, a first etch stop layer between the first bonding layer and the second substrate, and the first etch stop layer has high etch selectivity against the first bonding layer. In particular, some embodiments of the present disclosure relate to semiconductor structures with etch stop layer, methods for making the same, and methods using the same. |
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