Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

There is provided a technique that includes: (a1) supplying a first modifying gas to a substrate; (a2) supplying a first process gas containing a first element to the substrate; (b1) supplying a second modifying gas to the substrate; and (b2) supplying a second process gas, which contains a second e...

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Bibliographische Detailangaben
Hauptverfasser:	NAGATOMI, YOSHIMASA, ISOBE, NORIYUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	There is provided a technique that includes: (a1) supplying a first modifying gas to a substrate; (a2) supplying a first process gas containing a first element to the substrate; (b1) supplying a second modifying gas to the substrate; and (b2) supplying a second process gas, which contains a second element and is more readily adsorbed on a surface of the substrate than the first process gas under a same condition, to the substrate, wherein (a1) and (a2) are performed a first number of times and (b1) and (b2) are performed a second number of times to form a film containing the first element and the second element, and wherein (b1) is performed under a condition in which the second modifying gas is more readily adsorbed on the surface of the substrate than the first modifying gas under a same condition.