Liquid supply device, liquid supply method, and article manufacturing method providing a technology that facilitates supplying droplets onto a substrate with a high precision

The present invention provides a liquid supply device, a liquid supply method and an article manufacturing method, providing a technology that facilitates supplying droplets onto a substrate with a high precision. The liquid supply device for supplying a liquid onto the substrate comprises: a spraying unit that heats the liquid and sprays it out as droplets; and a control unit that controls a process of scanning the substrate and the spraying unit relative to each other while causing the spraying unit to spray the droplets. The control unit controls a process to correct a deviation of an attachment position of the droplets sprayed from the spraying unit on the substrate based on an amount of deformation of the substrate caused by influences of the heat of the spraying unit.