Pedestal with spiral vanes

This disclosure pertains to pedestal assemblies for supporting wafers in semiconductor manufacturing tools and chambers. Such pedestal assemblies may have a pedestal base that is configured with an internal plenum volume having a plurality of vanes distributed throughout along various spiral referen...

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Bibliographische Detailangaben
Hauptverfasser:	TORBATISARRAF, SEYEDALIREZA, HUBACEK, JEROME S, CHALMERS, JEFFREY MICHAEL, SOVANI, YOGESH MAHESH, TRAKROO, UJJWAL AASHRAY, LE GEAR, CONOR, BEN-YUHMIN, NARUDHA TAI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	This disclosure pertains to pedestal assemblies for supporting wafers in semiconductor manufacturing tools and chambers. Such pedestal assemblies may have a pedestal base that is configured with an internal plenum volume having a plurality of vanes distributed throughout along various spiral reference paths. Such pedestal bases may provide enhanced and more uniform cooling.