3D dynamic random access memory (DRAM) and methods for fabricating 3D-DRAM

A three-dimensional (3D) dynamic random-access memory (DRAM) includes a substrate and a plurality of nanosheet transistors stacked vertically on a surface of the substrate. Each of the nanosheet transistors comprises a gate, a source, and a drain. A plurality of bitlines is connected to correspondin...

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Bibliographische Detailangaben
Hauptverfasser: ERVIN, JOSEPH, VINCENT, BENJAMIN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A three-dimensional (3D) dynamic random-access memory (DRAM) includes a substrate and a plurality of nanosheet transistors stacked vertically on a surface of the substrate. Each of the nanosheet transistors comprises a gate, a source, and a drain. A plurality of bitlines is connected to corresponding ones of the drains of the nanosheet transistors on one side of the plurality of nanosheet transistors. A plurality of capacitors is stacked vertically on the substrate, extend parallel to a surface of the substrate, and are connected to corresponding ones of the sources on an opposite side of the plurality of nanosheet transistors.