Tilt calibration for probe systems

A probing system includes a device-under-test, a probe device, and a die bonder. The device-under-test includes test patterns. The probe device includes tilt angle sensors. The tilt angle sensors include spikes that protrude from the probe device. The die bonder is operational to mount the device-un...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TERTERIAN, SEVAG, BREWER, PETER D, ABIJAOUDE, CHARBEL, CARRASCO, DIEGO EDUARDO, CHANG, CHIA-MING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING ELECTRIC VARIABLES MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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