Tilt calibration for probe systems

A probing system includes a device-under-test, a probe device, and a die bonder. The device-under-test includes test patterns. The probe device includes tilt angle sensors. The tilt angle sensors include spikes that protrude from the probe device. The die bonder is operational to mount the device-un...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TERTERIAN, SEVAG, BREWER, PETER D, ABIJAOUDE, CHARBEL, CARRASCO, DIEGO EDUARDO, CHANG, CHIA-MING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A probing system includes a device-under-test, a probe device, and a die bonder. The device-under-test includes test patterns. The probe device includes tilt angle sensors. The tilt angle sensors include spikes that protrude from the probe device. The die bonder is operational to mount the device-under-test, mount the probe device facing the device-under-test, compress the probe device and the device-under-test together to causes a subset of the spikes to contact the test patterns, measure a number of connections formed between the tilt angle sensors and the test patterns, determine a first offset angle and a second offset angle between the device-under-test and the probe device based on the number of connections, adjust the spherical positioner in one or more rotational axes in response to the first offset angle and the second offset angle to change a parallelism between the device-under-test and the probe device.