End-to-end measurement for semiconductor specimens

There is provided a system and method for examining a semiconductor specimen. The method includes obtaining a runtime image of the specimen, and providing the runtime image as an input to an end-to-end (E2E) learning model to process, thereby obtaining, as an output of the E2E learning model, runtim...

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Bibliographische Detailangaben
Hauptverfasser: FRANK, TAL, TAL, NOAM, PELED, TOMER HAIM, DUBOVSKI, BAR, SKARIA, BOBIN MATHEW, LEVANT, BORIS
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:There is provided a system and method for examining a semiconductor specimen. The method includes obtaining a runtime image of the specimen, and providing the runtime image as an input to an end-to-end (E2E) learning model to process, thereby obtaining, as an output of the E2E learning model, runtime measurement data specific for a metrology application. The E2E learning model is previously trained for the metrology application using a training set comprising a plurality of training images of the specimen and respective ground truth measurement data associated therewith, and one or more cost functions specifically configured to evaluate, for the plurality of training images and corresponding training measurement data outputted by the E2E learning model, one or more metrology benchmarks from a group comprising precision, correlation, and matching.