Apparatus including two position detectors, and manufacturing method of article providing a technique advantageous for detecting the relative positions of two position detectors

Apparatus including two position detectors, and manufacturing method of article providing a technique advantageous for detecting the relative positions of two position detectors

An apparatus includes a first position detector for detecting a position of a first detection target of a first member, and a second position detector for detecting a position of a second detection target of a second member disposed opposite to the first member. The first position detector may inclu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMAGUCHI, SEIJI, ITO, MASAHIRO, NISHIKAWARA, TOMOFUMI, KAWAHARA, NOBUTO, YOSHIDA, KOJI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An apparatus includes a first position detector for detecting a position of a first detection target of a first member, and a second position detector for detecting a position of a second detection target of a second member disposed opposite to the first member. The first position detector may include a first image sensor, and a first optical system that forms an image of the first detection target on a photographing plane of the first image sensor. The second position detector may include a second image sensor, and a second optical system that forms an image of the second detection target on a photographing plane of the second image sensor. The first position detector and the second position detector may be configured to allow the second image sensor to photograph the first image sensor via the first optical system and the second optical system.