Surface observation method

This surface observation method comprises a step (a) and a step (b). In the step (a), materials including one or more kinds of solid light-emitting dye molecules are accumulated in a region, of a substrate or a structure on the substrate, having an abnormal shape. In the step (b), a fluorescent imag...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHIMURA, SATORU, OOWADA, SHIN, TANAKA, KAZUO, CHUJO, YOSHIKI, YUHARA, KAZUHIRO, ITO, SHUNICHIRO, ASAKO, RYUICHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:This surface observation method comprises a step (a) and a step (b). In the step (a), materials including one or more kinds of solid light-emitting dye molecules are accumulated in a region, of a substrate or a structure on the substrate, having an abnormal shape. In the step (b), a fluorescent image of the solid light-emitting dye molecules is acquired by applying illumination light to the region, of the substrate or the structure on the substrate, having the abnormal shape.