Cleaning composition and method of cleaning carbon-containing film using the same

The present invention relates to a cleaning composition comprising a solvent, a surfactant, and an oxidizing agent. The oxidizing agent included in the cleaning composition of the present invention oxidizes at least a portion of surfaces of a carbon-containing film and contaminants derived therefrom...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PAIK, UN-GYU, SONG, TAE-SEUP, LEE, GANG-GYU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES BASIC ELECTRIC ELEMENTS CANDLES CHEMISTRY DETERGENT COMPOSITIONS DETERGENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FATTY ACIDS THEREFROM METALLURGY RECOVERY OF GLYCEROL RESIN SOAPS SEMICONDUCTOR DEVICES SOAP OR SOAP-MAKING USE OF SINGLE SUBSTANCES AS DETERGENTS
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