Workpiece processing method
To provide a workpiece processing method that makes it possible to reduce the TTV of a workpiece. A workpiece processing method including a step in which a front surface protective sheet is attached to the front surface of a workpiece having front and rear surfaces and a step in which the rear surfa...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | To provide a workpiece processing method that makes it possible to reduce the TTV of a workpiece. A workpiece processing method including a step in which a front surface protective sheet is attached to the front surface of a workpiece having front and rear surfaces and a step in which the rear surface of the workpiece having the front surface protective sheet attached thereto is ground. The front surface of the workpiece has an inner peripheral section and an outer peripheral section surrounding the inner peripheral section, and the height of the outer peripheral section is lower than the height of the inner peripheral section. A protruding pattern is formed on the outer peripheral section in the step for attaching the front surface protective sheet, and when the difference between the height of the inner peripheral section and the height of the outer peripheral section is denoted by Hd and the height of the protruding pattern is denoted by H1, Hd and H1 satisfy the relationship Hd/1.2 < H1 < Hd/0.5. |
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