Vapor deposition mask package body and vapor deposition mask packaging method wherein the vapor deposition mask package body includes a first base and a second base

Vapor deposition mask package body and vapor deposition mask packaging method wherein the vapor deposition mask package body includes a first base and a second base

A vapor deposition mask package body of the present disclosure includes a first base and a second base. The first base includes a first base sheet and a first spacer. The first base sheet is bonded to a first facing surface. The first spacer is located outside the first base sheet in a plan view and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IWAKURA, YASUNORI, IBA, MASAFUMI, FUKAYA, KATSUMI
Format: Patent
Sprache:chi ; eng
Schlagworte:
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:A vapor deposition mask package body of the present disclosure includes a first base and a second base. The first base includes a first base sheet and a first spacer. The first base sheet is bonded to a first facing surface. The first spacer is located outside the first base sheet in a plan view and is joined to the first facing surface. The first spacer protrudes toward the second facing surface from the first base sheet and is in contact with the second facing surface. The second base includes a second base sheet. The second base sheet is bonded to the second facing surface. When a vapor deposition mask is located between the first base sheet and the second base sheet, a first gap is formed between the vapor deposition mask and the first spacer in a plan view.