Spectral feature control apparatus

A deep ultraviolet laser system includes a line narrowing module including a plurality of prisms such that an incoming laser beam from a laser first interacts with a first prism, then interacts with a second prism after the first prism. The second prism includes two different portions including a fi...

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Bibliographische Detailangaben
Hauptverfasser:	GILLESPIE, WALTER DALE, ZHAO, JIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A deep ultraviolet laser system includes a line narrowing module including a plurality of prisms such that an incoming laser beam from a laser first interacts with a first prism, then interacts with a second prism after the first prism. The second prism includes two different portions including a first portion designed to work with and enable higher bandwidths of the incoming laser beam and a second portion designed to work with and enable lower bandwidths of the incoming laser beam. The second prism is movable between a first position in which the laser beam interacts with the first portion and a second position in which the laser beam interacts with the first portion. The second prism is movable by translation using an activation mechanism controlled by a controller to vary a target bandwidth of the laser beam.