Biaxially aligned polyester film for dry film resist support body

To provide a biaxially aligned polyester film for a dry film resist support body, the biaxially aligned polyester film having: excellent processing suitability when subjected to a high-temperature laminating process with respect to a film for a dry-film resist, as a result of controlling the thermal...

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Bibliographische Detailangaben
Hauptverfasser:	HIGASHIOJI, TAKUJI, SENDAI, TOSHIHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING CHEMISTRY COMPOSITIONS BASED THEREON GENERAL PROCESSES OF COMPOUNDING INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULARARTICLES INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS THEIR PREPARATION OR CHEMICAL WORKING-UP TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL WORKING-UP
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Beschreibung
Zusammenfassung:	To provide a biaxially aligned polyester film for a dry film resist support body, the biaxially aligned polyester film having: excellent processing suitability when subjected to a high-temperature laminating process with respect to a film for a dry-film resist, as a result of controlling the thermal dimensional change rate in a specific temperature range; and excellent productivity and optical characteristics as a result of controlling the surface profile and the diameters of particles contained in the surface layers on both sides. Provided is a biaxially aligned polyester film for a dry film resist support body, configured such that when the film dimensional change rate when the film temperature is raised from 90 DEG C to 130 DEG C is expressed as [Delta]L90-130 DEG C (ppm/DEG C), the value at least in one direction is -50 to 150. The total film thickness of the biaxially aligned polyester film is 11 [mu]m to 50 [mu]m.