Substrate turning equipment

The invention discloses a substrate turning equipment. The substrate turning equipment includes a turning mechanism and a lifting mechanism. The turning mechanism includes a frame, a plurality of holding assembly, a plurality of tensioning assembly and a rotating assembly. The lifting mechanism incl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WEI, WENUNG, WU, TUNG-FANG, YANG, CHUNG-PING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a substrate turning equipment. The substrate turning equipment includes a turning mechanism and a lifting mechanism. The turning mechanism includes a frame, a plurality of holding assembly, a plurality of tensioning assembly and a rotating assembly. The lifting mechanism includes a carrying platform and a lifting assembly. The carrying platform is used for carrying the substrate. The plurality of holding assembly is used for holding the substrate on the carrying platform. The plurality of tensioning assembly is used to stretch the substrate held by the plurality of holding members. The lifting assembly can be controlled to move the carrying platform away from the frame. The rotating assembly can be controlled so that the frame and the substrate located in the frame rotate 180 degrees together.