Method and apparatus for multi-degrees of freedom error correction in which the apparatus includes a six-axis correction stage, an auto-collimation measurement device, a light splitter, a telecentric image measurement device, and a controller

The present invention relates to six-degree-of-freedom error correction method and apparatus. The apparatus includes a six-axis correction stage, an auto-collimation measurement device, a light splitter, a telecentric image measurement device, and a controller. The six-axis correction stage is used for carrying a device under test. The auto-collimation measurement device is arranged above the six-axis correction stage along a measurement optical axis. The light splitter is arranged on the measurement optical axis and is interposed between the six-axis correction stage and the auto-collimation measurement device. The telecentric image measurement device is arranged on one side of the measurement optical axis and corresponds to the light splitter. The method uses the controller to control the six-axis correction stage to correct rotation errors in at least two degrees of freedom of the device under test according to a measurement result of the auto-collimation measurement device, and controls the six-axis corre