Cleaning composition for adhesives

One embodiment of the present invention provides a cleaning composition that is for adhesives, and that exhibits excellent removability of the adhesives. One embodiment of the present disclosure pertains to a cleaning composition for removing adhesives remaining on wafers. This cleaning composition...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMADA, KOUHEI, TOTOKI, TAKENORI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:One embodiment of the present invention provides a cleaning composition that is for adhesives, and that exhibits excellent removability of the adhesives. One embodiment of the present disclosure pertains to a cleaning composition for removing adhesives remaining on wafers. This cleaning composition for adhesives contains a glycol ether (component A), a hydrocarbon (component B), and an alkanolamine (component C) having a linear alkanol group, and does not contain water or contains water in an amount of 10 mass% or less. The mass ratio A/B between the contained amount of component A and the contained amount of component B is 1.7 or less.