Substrate for inspection device, inspection device, and method for manufacturing inspection device
Provided is a substrate for an inspection device, the substrate having an average thickness of 250 [mu]m to 350 [mu]m and a density of 0.25*106g/m3 to 0.40*106g/m3.
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | Provided is a substrate for an inspection device, the substrate having an average thickness of 250 [mu]m to 350 [mu]m and a density of 0.25*106g/m3 to 0.40*106g/m3. |
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