Source selection module and associated metrology and lithographic apparatuses

Disclosed is a source selection module for selecting spectral characteristics of a broadband illumination beam to obtain a modulated illumination beam. The source selection module comprises a first beam dispersing element for dispersing the beam along a first direction, a second beam dispersing elem...

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Bibliographische Detailangaben
Hauptverfasser:	EURLINGS, MARKUS FRANCISCUS ANTONIUS, VAN VOORST, PETER DANNY, BASELMANS, JOHANNES JACOBUS MATHEUS, ZHOU, ZI-LI, VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING
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Beschreibung
Zusammenfassung:	Disclosed is a source selection module for selecting spectral characteristics of a broadband illumination beam to obtain a modulated illumination beam. The source selection module comprises a first beam dispersing element for dispersing the beam along a first direction, a second beam dispersing element for dispersing the beam along a second direction perpendicular to said first direction, a controllable diffractive element being operable to controllably spatially modulate the broadband illumination beam subsequent to being dispersed by said first beam dispersing element and said second beam dispersing element; and an aperture stop being operable to maximize transmission of one of specularly reflected radiation and diffracted radiation from said controllable diffractive element and minimize transmission of the other of said specularly reflected radiation and diffracted radiation.