Placement module, and positioning apparatus and inspection equipment with the placement module in which an object to be inspected can be inspected in a correct position

The present invention provides a placement module, and a positioning apparatus and inspection equipment with the placement module. The placement module is provided with a placement seat, and the placement seat has a positioning seat with a sucking hole. An air pressure joint is disposed on the place...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG, JING-DE, ZHOU, XUN-QIAN, XIE, ZHEN-SHENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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